P‐10.14: A Nanoscale Composite Substrate for Improving Micro‐LED Emission Efficiency and Reducing lift‐off Damage-Reference-Cited by-同舟云学术

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P‐10.14: A Nanoscale Composite Substrate for Improving Micro‐LED Emission Efficiency and Reducing lift‐off Damage

Published:2023-04 Issue:S1 Volume:54 Page:828-828
ISSN:0097-966X
Container-title:SID Symposium Digest of Technical Papers
language:en
Short-container-title:Symp Digest of Tech Papers

Author:

Zhang H.D.¹,Chen Z.Z.¹²³,Chen Y.Y.¹,Nie J.X.¹,Pan Z.J.¹,Deng C.H.¹,Dong B.Y.¹,Xin X.¹,Chen W.H.¹,Kang X.N.¹,Liang Z.W.²,Wang Q.²,Zhang G.Y.¹²,Shen B.¹³

Affiliation:

1. State Key Laboratory for Artificial Microstructure and Mesoscopic Physics, School of Physics Peking University Beijing China 100871

2. Dongguan Institute of Optoelectronics Peking University Dongguan, Guangdong China 523808

3. Peking University Yangtze Delta Institute of Optoelectronics Nantong, Jiangsu China 226000

Publisher

Wiley

Subject

General Medicine

Reference4 articles.

1. Laser-Processing for Patterned and Free-Standing Nitride Films;Kelly M.K.;MRS Online Proceedings Library,1997

2. Mechanisms and Performance Analysis of GaN-Based Micro-LED Grown on Pattern Sapphire Substrate by Laser Lift-Off Process

3. A study of GaN nucleation and coalescence in the initial growth stages on nanoscale patterned sapphire substrates via MOCVD

4. Chemical lift-off process for nitride LEDs from an Eco-GaN template using an AlN/strip-patterned-SiO2 sacrificial layer

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