Parametric analysis of the extraction of depth profile information from ARXPS data obtained on a silicon wafer sample
Author:
Publisher
Wiley
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference28 articles.
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3. Simulation study on regeneration of depth profiles from angle-resolved XPS data
4. Model for Analysis of XPS Electron Take-off Angle Experiments in Layer-structured Samples: Determination of Attenuation Lengths in a Well-characterized Langmuir-Blodgett Film
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3. Application of angle-resolved X-ray photon electron spectroscopy for interface and layer growth studies demonstrated on Ti/Ta-based films deposited on SiO2;Analytical and Bioanalytical Chemistry;2009-11-22
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