PIC – MCC Numerical Simulation of a DC Planar Magnetron
Author:
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Reference35 articles.
1. in: “Thin Film Processes”, , Eds., Academic, New York 1978, p. 76.
2. Model of the cathode fall region in magnetron discharges
3. Longitudinal distribution of plasma density in the low-pressure glow discharge with transverse magnetic field
4. Study of the plasma pre-sheath in magnetron discharges dominated by Bohm diffusion of electrons
5. The cylindrical DC magnetron discharge: I. Particle-in-cell simulation
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