Optical Emission Spectroscopy Analysis of Ar/N2 Plasma in Reactive Magnetron Sputtering
Author:
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/ppap.200931602/fullpdf
Reference13 articles.
1. Structure and elastic properties of amorphous silicon carbon nitride films
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5. Experimental study of the temporal evolution of N2(C3Πu) and N2(B3Πg) in a nitrogen pulsed discharge
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