Kinetics of RPECVD Organosilicon Polymer Post-treatment in a N2 /O2 Microwave Plasma Remote Afterglow
Author:
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/ppap.200900185/fullpdf
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