Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation
Author:
Affiliation:
1. Technical and Macromolecular Chemistry Paderborn University Paderborn Germany
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/ppap.202200052
Reference74 articles.
1. Organosilicon thin films deposited by plasma enhanced CVD: Thermal changes of chemical structure and mechanical properties
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4. Effect of surface modification on the properties of plasma‐polymerized hexamethyldisiloxane thin films
5. Deposition rate and three-dimensional uniformity of RF plasma deposited SiOx films
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