Chemical Vapor Deposition of Organosilicon Thin Films from Methylmethoxysilanes
Author:
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Reference34 articles.
1. “Plasma Deposition, Treatment, and Etching of Polymers”, Academic Press, Boston 1990.
2. , in: “Plasma-Polymerized Organosilicones and Organometallics”, Ed., Academic Press, Boston 1990.
3. Plasma polymerization investigated by the substrate temperature dependence
4. Overall kinetics of SiOx remote-PECVD using different organosilicon monomers
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