Study of Inductive Coupled Hydrogen and Argon Plasma Interaction with SiO2 Glass
Author:
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/ppap.200930508/fullpdf
Reference6 articles.
1. Study of the High-Frequency Inductive Coupled Discharge Plasma Interaction with Walls
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