Optical and electrical properties of capacitive coupled radio frequency Ar-H2mixture discharge at the low pressure
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Published:2017-10
Issue:10
Volume:24
Page:102123
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ISSN:1070-664X
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Container-title:Physics of Plasmas
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language:en
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Short-container-title:Physics of Plasmas
Author:
Tanışlı MuratORCID,
Şahin Neslihan,
Younus Maria,
Rehman Najeeb Ur,
Demir Süleyman
Subject
Condensed Matter Physics
Cited by
7 articles.
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