Production and Control of Large-Area Plasmas for Meters-Scale Flat-Panel-Display Processing with Multiple Low-Inductance Antenna Modules
Author:
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Reference20 articles.
1. , “Principles of Plasma Discharges and Materials Processing”, Wiley, New York 1994.
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4. Review of inductively coupled plasmas for plasma processing
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