1. Key Laboratory of Terahertz Solid State Technology Shanghai Institute of Microsystem and Information Technology Chinese Academy of Sciences 865 Changning road Shanghai 200050 China
2. Center of Materials Science and Optoelectronics Engineering University of Chinese Academy of Sciences Beijing 100049 China
3. School of Information Science and Technology ShanghaiTech University 393 Middle Huaxia Road Shanghai 201210 China
4. SIMIC Advanced Micro Semiconductors Co., Ltd. 888 2nd West Huanhu Street Pudong Shanghai 201306 China
5. Institute of Electronics Microelectronics and Nanotechnology University Lille ISEN, CNRS, UMR 8520 Villeneuve d'Ascq 59652 France