1. National Key Laboratory of Materials for Integrated Circuits and Key Laboratory of Terahertz Solid State Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China
2. Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3. Chongqing Key Laboratory of Precision Optics, Chongqing Institute of East China Normal University, Chongqing 401120, China
4. Institute of Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Nakacho, Koganei-shi 184-8588, Tokyo, Japan
5. State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200241, China
6. Chongqing Institute for Brain and Intelligence, Guangyang Bay Laboratory, Chongqing 400064, China