1. Key Laboratory of Microelectronic Devices and Circuits (MOE) Institute of Microelectronics Peking University Beijing 100871 China
2. National Key Laboratory of Science and Technology on Micro/Nano Fabrication Institute of Microelectronics Peking University Beijing 100871 China
3. Frontiers Science Center for Nano‐optoelectronics Peking University Beijing 100871 China