Analysis of polymer flow in embossing stage during thermal nanoimprint lithography
Author:
Publisher
Wiley
Subject
Materials Chemistry,Polymers and Plastics,General Chemistry,Materials Chemistry,Polymers and Plastics,General Chemistry
Reference20 articles.
1. Sub-10 nm imprint lithography and applications
2. Imprint Lithography with 25-Nanometer Resolution
3. Nano-compact disks with 400 Gbit/in2 storage density fabricated using nanoimprint lithography and read with proximal probe
4. Problems of the nanoimprinting technique for nanometer scale pattern definition
5. Hot embossing in microfabrication. Part II: Rheological characterization and process analysis
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