Effects of cavity shapes and rounded corners of mold on polymer filling process in nanoimprint lithography-Reference-Cited by-同舟云学术

Effects of cavity shapes and rounded corners of mold on polymer filling process in nanoimprint lithography

Published:2020-11 Issue:6 Volume:38 Page:062802
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Ma Lijun¹²,Zhang Mingya¹,Zhang Xiaolei¹,Zheng Xu¹,Xue Shifeng²,Wang Qing¹^ORCID

Affiliation:

1. Institute of NanoEngineering, College of Civil Engineering and Architecture, Shandong University of Science and Technology, Qingdao 266590, China

2. Department of Engineering Mechanics, College of Pipeline and Civil Engineering, China University of Petroleum (East China), Qingdao 266580, China

Funder

Taishan Scholar Project of Shandong Province

Natural Science Foundation of Shandong Province

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/6.0000498

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effects of microstructure and vibration parameters on mechanical properties of nanoimprinted FeNiCrCoCu high-entropy alloys;Physica B: Condensed Matter;2023-09

2. Large-Scale Moth-Eye-Structured Roll Mold Fabrication Using Sputtered Glassy Carbon Layer and Transferred Moth-Eye Film Characterization;Nanomaterials;2023-05-09

3. Study on surface texture patterns for improving tribological performance of bioimplants;Surface and Coatings Technology;2021-09

4. Ultra-Compact Low Loss Polymer Wavelength (De)Multiplexer With Spot-Size Convertor Using Topology Optimization;IEEE Photonics Journal;2021-06