Surface transient effects in ultralow-energy O2+ sputtering of silicon
Author:
Publisher
Wiley
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference30 articles.
1. Recent successes in the use of secondary ion mass spectrometry in microelectronics materials and processing
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4. Surface transient effects in ultralow-energy Cs+ sputtering of Si;Surface and Interface Analysis;2007
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