1. Several excellent reviews exist in this field, two of which are: , and , Hydrogen in Crystalline Semiconductors (Springer-Verlag, Berlin, 1992);
2. and (Eds.), Semiconductors and Semimetals, Vol. 34 (Academic, Boston, 1991).
3. See e.g.Silicon Processing for the VLSI Era, Vol. 3 (Lattice Press, 1995).
4. Reduction of hot electron degradation in metal oxide semiconductor transistors by deuterium processing
5. Deactivation of the boron acceptor in silicon by hydrogen