Annealing of Pt‐H Defects in High‐Voltage Si p+/n− Diodes-Reference-Cited by-同舟云学术

Annealing of Pt‐H Defects in High‐Voltage Si p+/n− Diodes

Published:2019-07-05 Issue:17 Volume:216 Page:1900197
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Phys. Status Solidi A

Author:

Rasinger Fabian¹²^ORCID,Prohinig Jennifer¹³,Schulze Holger⁴,Schulze Hans-Joachim⁵,Pobegen Gregor¹

Affiliation:

1. KAI Kompetenzzentrum Automobil- und Industrieelektronik GmbH 9524 Villach Austria

2. Lehrstuhl für Angewandte Physik, Department PhysikFriedrich-Alexander University Erlangen-Nürnberg 91058 Erlangen Germany

3. Institute of Solid State PhysicsUniversity of Technology 8010 Graz Austria

4. Infineon Technologies Austria AG 9500 Villach Austria

5. Infineon Technologies AG 85579 Neubiberg Germany

Funder

Österreichische Forschungsförderungsgesellschaft

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/pssa.201900197

Reference22 articles.

1. E.Badr P.Pichler G.Schmidt inPh. D. Research in Microelectronics and Electronics (PRIME) 2013 9th Conf. on IEEE2013 pp.253–256.

2. Modeling platinum diffusion in silicon

3. Silicon self‐interstitial properties deduced from platinum profiles after annealing with controlled cooling

4. M.Hauf C.Sandow F. J.Niedernostheide G.Schmidt in2018 IEEE 30th Int. Symp. on Power Semiconductor Devices and ICs (ISPSD) IEEE2018 pp.120–123.

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1. Modeling of carrier lifetime based on Deep-Level Transient Spectroscopy for power PIN diodes;2022 IEEE International Conference on Electrical Sciences and Technologies in Maghreb (CISTEM);2022-10-26

2. Measurement of the PtH defect depth profiles in fully processed silicon high-voltage diodes by improved current transient spectroscopy;2022 IEEE 34th International Symposium on Power Semiconductor Devices and ICs (ISPSD);2022-05-22