Properties of non-stoichiometric nitrogen doped LPCVD silicon thin films
Author:
Publisher
Wiley
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/crat.200900624/fullpdf
Reference15 articles.
1. The Impact of Nitrogen Engineering in Silicon Oxynitride Gate Dielectric on Negative-Bias Temperature Instability of p-MOSFETs: A Study by Ultrafast On-The-Fly $I_{\rm DLIN}$ Technique
2. Electrical properties of MOS structures on nitrogen-doped Czochralski-grown silicon: A positron annihilation study
3. Improvement of the radiation hardness of SIMOX buried layers using nitrogen implantation
4. Residual stress in low pressure chemical vapor deposition SiNx films deposited from silane and ammonia
5. Plasma enhanced chemical vapor deposition of nitrogen-incorporated silicon oxide films using TMOS/N2O gas
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effect of the reflection by the silicon aggregates on the photoluminescence from silicon nitride film embedded silicon nanocrystals;Materials Science in Semiconductor Processing;2017-09
2. Photoluminescence from silicon nanocrystals embedded in silicon nitride fabricated by low-pressure chemical vapor deposition followed by high-temperature annealing;Journal of Applied Physics;2015-02-14
3. Kinetic Monte Carlo simulation of low-pressure chemical vapor deposition of silicon nitride: Impact of gas flow rate and temperature on silicon cluster size and density;Materials Science in Semiconductor Processing;2014-10
4. Formation of silicon nanocrystals by thermal annealing of low-pressure chemical-vapor deposited amorphous SiNx (x=0.16) thin films;Materials Science in Semiconductor Processing;2013-12
5. Study of grains size distribution and electrical activity of heavily boron doped polysilicon thin films;Materials Science in Semiconductor Processing;2011-09
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3