Silicon carbide growth mechanisms from SiH4, SiHCl3 and nC3H8-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Silicon carbide growth mechanisms from SiH4, SiHCl3 and nC3H8

Published:2005-11 Issue:10-11 Volume:40 Page:967-971
ISSN:0232-1300
Container-title:Crystal Research and Technology
language:en
Short-container-title:Cryst. Res. Technol.

Author:

Veneroni A.,Omarini F.,Masi M.

Publisher

Wiley

Subject

Condensed Matter Physics,General Materials Science,General Chemistry

Reference11 articles.

1. , , , , , , , , , , , , , , , , , , and , Mater. Sci. Forum (2004), in press.

2. , , , and , Mater. Sci. Forum (2004), in press.

3. and , in Epitaxial Silicon, D. Crippa, M. Masi, D. L. Rode (Eds.), Academic Press, UK, 2001, p. 51.

4. Reduced order model for the CVD of epitaxial silicon from silane and chlorosilanes

5. , , , , , , and , J. Cryst. Growth (2004), in press.

Cited by 24 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optimizing the chemical vapor deposition process of 4H–SiC epitaxial layer growth with machine-learning-assisted multiphysics simulations;Case Studies in Thermal Engineering;2024-07

2. Optimizing the Chemical Vapor Deposition Process of 4h-Sic Epitaxial Layer Growth with Machine-Learning-Assisted Multiphysics Simulations;2024

3. Thermal Decomposition Mechanism of Tetraethylsilane by Flash Pyrolysis Vacuum Ultraviolet Photoionization Mass Spectrometry and DFT Calculations: The Competition between β-Hydride Elimination and Bond Homolysis;The Journal of Physical Chemistry A;2023-04-28

4. Status of 3 C ‐ SiC Growth and Device Technology;Wide Bandgap Semiconductors for Power Electronics;2021-10-29

5. Finite temperature behavior of carbon atom-doped silicon clusters: depressed thermal stabilities, coexisting isomers, reversible dynamical pathways and fragmentation channels;New Journal of Chemistry;2021

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3