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Influence of biofunctionalization process on properties of silicon oxynitride substrate layer

  • Published:2014-01-23 Issue:10-11 Volume:46 Page:1086-1089
  • ISSN:0142-2421
  • Container-title:Surface and Interface Analysis
  • language:en
  • Short-container-title:Surf. Interface Anal.

Author:

Kalisz M.12,Szymańska M.2,Dębowska A. K.1,Michalak B.1,Brzozowska E.3,Górska S.3,Śmietana M.1

Affiliation:

1. Institute of Microelectronics and Optoelectronics; Warsaw University of Technology; Koszykowa 75 00-662 Warsaw Poland

2. Motor Transport Institute; Jagiellońska 80 03-301 Warsaw Poland

3. Institute of Immunology and Experimental Therapy; Polish Academy of Sciences; Weigla 12 53-114 Wrocław Poland

Funder

Foundation For Polish Science

National Centre for Research and Development of Poland

National Science Centre of Poland

Publisher

Wiley

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

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