Silicon oxynitride prepared by chemical vapor deposition as optical waveguide materials-Reference-Cited by-同舟云学术

Silicon oxynitride prepared by chemical vapor deposition as optical waveguide materials

Published:2006-02 Issue:1 Volume:288 Page:171-175
ISSN:0022-0248
Container-title:Journal of Crystal Growth
language:en
Short-container-title:Journal of Crystal Growth

Author:

Wong C.K.,Wong Hei,Kok C.W.,Chan M.

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference13 articles.

1. H. Wong, in: Proceedings of the 11th IEEE International Symposium Electron Devices for Microwave and Optoelectronic Application (EDMO 2003), Orlando, USA, November 2003, p. 145.

2. Recent developments in silicon optoelectronic devices

3. Silicon oxynitride planar waveguiding structures for application in optical communication

4. Preparation of Thin Dielectric Film for Nonvolatile Memory by Thermal Oxidation of Si-Rich LPCVD Nitride

5. Bonding structures of silicon oxynitride prepared by oxidation of Si-rich silicon nitride

Cited by 27 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Comment on “Bipolar Resistive Switching in Lanthanum Titanium Oxide and an Increased On/Off Ratio Using an Oxygen-Deficient ZnO Interlayer”;ACS Applied Materials & Interfaces;2024-02-21

2. Spectroscopic ellipsometry and FTIR characterization of annealed SiOxNy:H films prepared by PECVD;Optical Materials;2021-12

3. Amorphous Silicon Oxynitride-Based Powders Produced by Spray Pyrolysis from Liquid Organosilicon Compounds;Materials;2021-01-14

4. Diamond-blade diced trapezoidal ridge waveguides in YCOB crystal for second harmonic generation;Optics & Laser Technology;2020-06

5. Optical Waveguides on Three Material Platforms of Silicon-on-Insulator, Amorphous Silicon and Silicon Nitride;IEEE Journal of Selected Topics in Quantum Electronics;2016-11