Silicon oxynitride prepared by chemical vapor deposition as optical waveguide materials
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference13 articles.
1. H. Wong, in: Proceedings of the 11th IEEE International Symposium Electron Devices for Microwave and Optoelectronic Application (EDMO 2003), Orlando, USA, November 2003, p. 145.
2. Recent developments in silicon optoelectronic devices
3. Silicon oxynitride planar waveguiding structures for application in optical communication
4. Preparation of Thin Dielectric Film for Nonvolatile Memory by Thermal Oxidation of Si-Rich LPCVD Nitride
5. Bonding structures of silicon oxynitride prepared by oxidation of Si-rich silicon nitride
Cited by 26 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Spectroscopic ellipsometry and FTIR characterization of annealed SiOxNy:H films prepared by PECVD;Optical Materials;2021-12
2. Amorphous Silicon Oxynitride-Based Powders Produced by Spray Pyrolysis from Liquid Organosilicon Compounds;Materials;2021-01-14
3. Diamond-blade diced trapezoidal ridge waveguides in YCOB crystal for second harmonic generation;Optics & Laser Technology;2020-06
4. Optical Waveguides on Three Material Platforms of Silicon-on-Insulator, Amorphous Silicon and Silicon Nitride;IEEE Journal of Selected Topics in Quantum Electronics;2016-11
5. Surface passivation of boron emitters on n-type c-Si solar cells using silicon dioxide and a PECVD silicon oxynitride stack;RSC Advances;2016
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3