Doped Polycrystalline Silicon Thin Films Deposited on Glass from Trichlorosilane**-Reference-Cited by-同舟云学术

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Doped Polycrystalline Silicon Thin Films Deposited on Glass from Trichlorosilane**

Published:2015-01-02 Issue:1-2-3 Volume:21 Page:54-62
ISSN:0948-1907
Container-title:Chemical Vapor Deposition
language:en
Short-container-title:Chem. Vap. Deposition

Author:

Benvenuto Ariel G.¹,Buitrago Román H.¹,Schmidt Javier A.¹

Affiliation:

1. Instituto de Física del Litoral (IFIS-Litoral); Guemes 3450 S3000GLN Santa Fe Argentina

Publisher

Wiley

Subject

Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/cvde.201407139/fullpdf

Reference35 articles.

1. Thin-film polysilicon solar cells on foreign substrates using direct thermal CVD: material and solar cell design

2. S. Reber T. Kieliba S. Bau J. Poortmans V. Arkhipov Wiley Chichester 2006

3. www.schott.com 2004

4. Silicon thin films obtained by rapid thermal atmospheric pressure chemical vapour deposition

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1. Study on the fundamental factors of the property evolution of a 300 mm polycrystalline trap-rich layer;Semiconductor Science and Technology;2023-07-21

2. Phosphorus Dopant Diffusion, Activation, and Annealing. Using Infrared Laser for Synthesis of n-Type Silicon Thin Film;Journal of Russian Laser Research;2020-09

3. Spray coating assisted solution-processed fabrication of phosphorus doped nanocrystalline silicon thin films: Micro-structure evolution, optical and electrical properties;Materials Science in Semiconductor Processing;2019-10

4. Flexible Solar Cells Using Doped Crystalline Si Film Prepared by Self-Biased Sputtering Solid Doping Source in SiCl4/H2 Microwave Plasma;ACS Applied Materials & Interfaces;2016-02-09

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