Flexible Solar Cells Using Doped Crystalline Si Film Prepared by Self-Biased Sputtering Solid Doping Source in SiCl4/H2 Microwave Plasma-Reference-Cited by-同舟云学术

Flexible Solar Cells Using Doped Crystalline Si Film Prepared by Self-Biased Sputtering Solid Doping Source in SiCl4/H2 Microwave Plasma

Published:2016-02-09 Issue:7 Volume:8 Page:4624-4632
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Hsieh Ping-Yen¹,Lee Chi-Young¹,Tai Nyan-Hwa¹

Affiliation:

1. Department of Materials Science and Engineering, National Tsing Hua University, No. 101, Section 2, Kuang-Fu Road, Hsinchu 30013, Taiwan Republic of China

Funder

National Science Council Taiwan

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.5b11151

Reference34 articles.

1. Dilution effect of Ar/H2 on the microstructures and photovoltaic properties of nc-Si:H deposited in low frequency inductively coupled plasma

2. Highly conducting phosphorous doped n-type nc-Si:H films by HW-CVD for c-Si heterojunction solar cells

3. EELS measurements of boron concentration profiles in p-a-Si and nip a-Si solar cells

4. Hot-wire chemical vapor deposition and characterization of p-type nanocrystalline Si films for thin film photovoltaic applications

5. Highly doped p-type microcrystalline silicon thin films fabricated by a low-frequency inductively coupled plasma at a low temperature

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