Improvement on Fluorine Migration from SF6 to SiF4 by an Efficient Mediator of Fe2O3/Cr2O3 Composites
Author:
Affiliation:
1. School of Chemical Engineering and Australian Centre for Nanomedicine (ACN), University of New South Wales, Sydney, New South Wales 2052, Australia
Funder
National Natural Science Foundation of China
Science and Technology Commission of Shanghai Municipality
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.9b01432
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4. Structural and Electrical Characterization of SiO2 Gate Dielectrics Deposited from Solutions at Moderate Temperatures in Air
5. Flexible Solar Cells Using Doped Crystalline Si Film Prepared by Self-Biased Sputtering Solid Doping Source in SiCl4/H2 Microwave Plasma
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