Study of Electronegative Ar/O2Discharge by Means of Langmuir Probe
Author:
Publisher
Wiley
Subject
Condensed Matter Physics
Reference9 articles.
1. Measurements of negative ion density in O2/Ar electron cyclotron resonance plasma
2. Determination of negative-ion density in an electron cyclotron resonance C4F8 plasma
3. Planar magnetron sputtering
4. Magnetron sputtering: basic physics and application to cylindrical magnetrons
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