Effects of surface structure on depth resolution of AES depth profiles of Ni/Cr multilayers
Author:
Publisher
Wiley
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference17 articles.
1. Depth resolution of multilayer Cr/Ni thin film structures deposited on substrates with different roughness
2. Superposition of Auger electron spectroscopy depth profiles obtained on Cr/Ni multilayer samples with different roughnesses
3. Depth resolution in Auger depth profile analysis of aluminum metallization in microelectronics: The effect of crystalline texture
4. Crystalline effects on depth resolution in AES depth profiling
5. In Practical Surface Analysis with AES and XPS (2nd edn). (eds). John Wiley: Chichester, 1990; 143.
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