Crystalline effects on depth resolution in AES depth profiling
Author:
Publisher
Wiley
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference27 articles.
1. Analysis of AlGaAs/GaAs superlattices by means of sputter-assisted AES, SEM and TEM
2. Quantitative analysis of AlxGa1-xAs/GaAs multiquantum wells by means of AES depth profiling and small area XPS
3. Improved depth resolution by sample rotation during Auger electron spectroscopy depth profiling
4. Ion beam induced roughness and its effect in AES depth profiling of multilayer Ni/Cr thin films
5. Significance of sample rotation in auger electronspectroscopy sputter depth profiling of thin films
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effects of surface structure on depth resolution of AES depth profiles of Ni/Cr multilayers;Surface and Interface Analysis;2000
2. AES Depth Profiling of Semiconducting Epitaxial Layers with Thicknesses in the Nanometre Range Using an Ion Beam Bevelling Technique;Surface and Interface Analysis;1997-06
3. AES Depth profiling of semiconducting multilayer structures using an ion beam bevelling technique;Fresenius' Journal of Analytical Chemistry;1997-05-21
4. Surface Analysis: X-ray Photoelectron Spectroscopy and Auger Electron Spectroscopy;Analytical Chemistry;1996-01-01
5. Atomic mixing, surface roughness and information depth in high-resolution AES depth profiling of a GaAs/AlAs superlattice structure;Surface and Interface Analysis;1994-09
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