Molecular-Controlled Fracture and Release of Templated Nanoporous Organosilicate Thin Films-Reference-Cited by-同舟云学术

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Molecular-Controlled Fracture and Release of Templated Nanoporous Organosilicate Thin Films

Published:2008-08-18 Issue:16 Volume:20 Page:3159-3164
ISSN:0935-9648
Container-title:Advanced Materials
language:en
Short-container-title:Adv. Mater.

Author:

Ong Markus D.,Volksen Willi,Dubois Geraud,Lee Victor,Brock Phillip J.,Deline Vaughn R.,Miller Robert D.,Dauskardt Reinhold H.

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference25 articles.

1. Toughening of nanoporous glasses using porogen residuals

2. Fracture of nanoporous methyl silsesquioxane thin-film glasses

3. Fracture of nanoporous thin-film glasses

4. Impact of LKD5109™ low-k to cap/liner interfaces in single damascene process and performance

5. Templating Nanoporosity in Thin-Film Dielectric Insulators

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