Two-Dimensional Patterning of Flexible Designs with High Half-Pitch Resolution by Using Block Copolymer Lithography
Author:
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference48 articles.
1. Block Copolymer Lithography: Periodic Arrays of ~10 11 Holes in 1 Square Centimeter
2. Graphoepitaxy of Spherical Domain Block Copolymer Films
3. Effects of Lateral Confinement on Order in Spherical Domain Block Copolymer Thin Films
4. Block Copolymer Lithography: Merging “Bottom-Up” with “Top-Down” Processes
5. Templated Self-Assembly of Block Copolymers: Top-Down Helps Bottom-Up
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