Integration of Single-Crystal LiNbO3 Thin Film on Silicon by Laser Irradiation and Ion Implantation– Induced Layer Transfer
Author:
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference21 articles.
1. Alternative dielectrics to silicon dioxide for memory and logic devices
2. Lithium niobate: Summary of physical properties and crystal structure
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4. Silicon on insulator material technology
5. Layer splitting process in hydrogen-implanted Si, Ge, SiC, and diamond substrates
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