1. Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China
2. Faraday Technology Corporation SZ, Suzhou 215123, China
3. Jiangsu Institute of Advanced Semiconductors Ltd., Suzhou 215123, China
4. Guangdong Institute of Semiconductor Micro−Nano Manufacturing Technology, Foshan 528000, China
5. Xinjiang Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Urumchi 830011, China