Rigiflex Lithography for Nanostructure Transfer
Author:
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference22 articles.
1. Imprint of sub‐25 nm vias and trenches in polymers
2. Soft Lithography
3. Capillary Force Lithography
4. Fabrication of three-dimensional microstructures by soft molding
5. Sub-10 nm imprint lithography and applications
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