Author:
Asif Muhammad H.,Graczyk Mariusz,Heidari Babak,Maximov Ivan
Funder
Swedish Foundation for Strategic Research
Lunds Universitet NanoLund
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference19 articles.
1. Imprint of sub-25 nm vias and trenches in polymers;Chou;Appl. Phys. Lett.,1995
2. Large scale nanolithography using nanoimprint lithography;Heidari;J. Vac. Sci. Technol., B: Microelectron Process. Phenom.,1999
3. Nanoimprint lithography at the 6 in. wafer scale;Heidari;J. Vac. Sci. Technol. B,2000
4. Nanoimprint lithography: an alternative nanofabrication approach;Sotomayor Torres;Mater. Sci. Eng. C,2003
5. Nanoimprint lithography: an old story in modern times? A review;Schift;J. Vac. Sci. Technol. B,2008
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