Reduction of on-resistance in ion-implanted GaN/AlGaN/GaN HEMTs with low gate leakage current

Author:

Nomoto Kazuki,Satoh Masataka,Nakamura Tohru

Publisher

Wiley

Subject

Applied Mathematics,Electrical and Electronic Engineering,Computer Networks and Communications,General Physics and Astronomy,Signal Processing

Reference7 articles.

1. Current state and prospects for high-frequency devices using GaN;Ono;FED Rev,2001

2. GaN HEMT devices in wireless systems;Seki;FED Rev,2003

3. Kamo Y Takeuchi H Yamamoto Y Totsuka M Shiga T Minami H Kitano T Miyakuni S Oka T Inoue A Nanjo T Chiba H Suita M Oishi T Abe Y Tsuyama Y Shirahana R Ohtsuka H Iyomasa K Yamanaka K Hieda M Nakayama M Ishikawa T Takagi T Marumoto K Matsuda Y AC-band AlGaN/GaN HEMT with Cat-CVD SiN passivation developed for an over 100 W operation 495 498 2005

4. Mechanism of current collapse removal in field-plated nitride HFETs;Koudymov;IEEE Electron Device Lett,2005

5. Kikkawa T Nagahara M Okamoto N Tateno Y Yamaguchi Y Hara N Joshin K Asbeck PM Surface-charge controlled AlGaN/GaN-power HFET without current collapse and g m dispersion 24.4.1 25.4.4

Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Enhanced gmand fTWith High Johnson’s Figure-of-Merit in Thin Barrier AlGaN/GaN HEMTs by TiN-Based Source Contact Ledge;IEEE Electron Device Letters;2017-11

2. Characterization of silicon ion-implanted GaN and AlGaN;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2012-02

3. SiC backside source grounding process for AlGaN/GaN HEMT by physical dicing method;Electronics Letters;2012

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