Rapid Coating of Through-Porous Substrates by Atomic Layer Deposition
Author:
Publisher
Wiley
Subject
Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry
Reference11 articles.
1. M. Ritala, M. Leskelä, in Handbook of Thin Film Materials (Ed: S. Nalwa) Academic Press, San Diego, CA 2002, p. 103.
2. Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges
3. Atomic layer deposition of metal and nitride thin films: Current research efforts and applications for semiconductor device processing
4. A Kinetic Model for Step Coverage by Atomic Layer Deposition in Narrow Holes or Trenches
5. Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition
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