Strain Tailoring in 3C-SiC Heteroepitaxial Layers Grown on Si(100)
Author:
Publisher
Wiley
Subject
Process Chemistry and Technology,Surfaces and Interfaces,General Chemistry
Link
http://onlinelibrary.wiley.com/wol1/doi/10.1002/cvde.200506461/fullpdf
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5. Growth of CVD Thin Films and Thick LPE 3C SiC in a Specially Designed Reactor
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