Affiliation:
1. Electronic Materials Research Laboratory Key Laboratory of the Ministry of Education & International Center for Dielectric Research School of Electronics and Information Engineering State Key Laboratory for Mechanical Behavior of Materials International Joint Laboratory for Micro/Nano Manufacture and Measurement Technology Xi'an Jiaotong University Xi'an 710049 P. R. China
Abstract
AbstractFerroelectric memory is one of the most attractive emerging nonvolatile memory. Conventional methods to increase storage density in ferroelectrics include reducing the storage bit size or fabricating 3D stacks. However, the former will face a physical limit finally, and the integration of single‐crystalline ferroelectric oxide following the latter still remains a great challenge. Here, a new method is introduced to construct a scroll‐like 3D memory structure by self‐rolling‐up single‐crystalline ferroelectric oxides. PbZr0.3Ti0.7O3 single‐crystalline thin film is chosen as a prototype and epitaxially grown on another oxide stressor layer with a few lattice‐mismatch. Releasing such “Pb(Zr, Ti)O3/stressor” bilayered structure from the substrate induces self‐rolling‐up due to the internal stress from the lattice‐mismatch. High‐density information can be written in the form of switched ferroelectric domains on those flat “Pb(Zr, Ti)O3/stressor” membranes via piezoelectric force microscopy. In self‐rolling‐up membranes, information density can be experimentally enhanced up to 45 times. Theoretically, the freestanding “Pb(Zr, Ti)O3/stressor” membranes have a strongly driven force to self‐rolling‐up, and the area ratio can enhance 100–450 times, corresponding to an ultra‐high density information storage of 102 Tbit In−2. This study provides a new and general method to develop compact, high‐density, and 3D memories from oxide materials.
Funder
National Key Research and Development Program of China
National Natural Science Foundation of China
China Postdoctoral Science Foundation
Higher Education Discipline Innovation Project
Fundamental Research Funds for the Central Universities
Subject
Electrochemistry,Condensed Matter Physics,Biomaterials,Electronic, Optical and Magnetic Materials
Cited by
10 articles.
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