1. Chair of Electronic Devices RWTH Aachen University Otto‐Blumenthal‐Str. 2 52074 Aachen Germany
2. Institute of Physics Faculty of Electrical Engineering and Information Technology (EIT 2) Universität der Bundeswehr München Werner‐Heisenberg‐Weg 39 85577 Neubiberg Germany
3. AMO GmbH Advanced Microelectronic Center Aachen Otto‐Blumenthal‐Str. 25 52074 Aachen Germany
4. Central Facility for Electron Microscopy RWTH Aachen University Ahornstr. 55 52074 Aachen Germany
5. Ernst Ruska‐Centre for Microscopy and Spectroscopy with Electrons (ER‐C) Forschungszentrum Jülich GmbH 52425 Jülich Germany
6. Chair of Smart Sensor Systems Bergische Universität Wuppertal Lise‐Meitner‐Str. 13 42119 Wuppertal Germany