Affiliation:
1. Information Materials and Intelligent Sensing Laboratory of Anhui Province Anhui University 111 Jiu Long Road Hefei 230601 China
2. Hefei University of Technology Hefei 230009 China
3. School of Mathematical Sciences Anhui University 111 Jiu Long Road Hefei 230601 China
4. Hefei National Laboratory for Physical Sciences at the Microscale CAS Key Laboratory of Mechanical Behavior and Design of Materials Department of Precision Machinery and Precision Instrumentation University of Science and Technology of China Hefei Anhui 230027 China
5. School of Mechanical Engineering Suzhou University of Science and Technology Suzhou 215009 China
Abstract
AbstractNanoscale optical sensing plays a crucial role in achieving high‐precision non‐contact distance and displacement measurements. As one of the promising alternatives, structured light can greatly simplify optical sensing systems. In this study, a novel optical phenomenon of a structured beam called the “Dumpling‐shaped Structured Light Field” (DSLF) is revealed, which forms during the focusing of cylindrical lens beams. The 3D DSLF comprises two mutually perpendicular primary and secondary foci, offering unique possibilities in micro/nano processing and sensing applications. A thorough investigation of the DSLF is conducted, revealing a correlation between the secondary foci and the phase status at the objective lens's entrance pupil. The propagation of DSLF under tight focus conditions has been verified and discussed through methods of femtosecond laser two‐photon polymerization and light field analysis. Finally, thanks to the unique 3D intensity distribution of 3D DSLF, the applicability of DSLF in high‐precision position and vibration sensing has been demonstrated. By detecting the horizontal and vertical dimensions of the reflected DSLF, position and vibration sensing is achieved with a Z‐direction accuracy of 10 nm (λ/80). This research contributes to understanding structured light, and offers practical applications in various fields, including micro/nano laser processing, optical imaging, sensing, etc.
Funder
National Key Research and Development Program of China
National Natural Science Foundation of China