1. School of Information and Intelligence Engineering University of Sanya Sanya 572022 P. R. China
2. Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education) School of Materials Science and Engineering Dalian University of Technology Dalian 116024 P. R. China
3. Fraunhofer Institute for Photonic Microsystems IPMS Center Nanoelectronic Technologies (CNT) An der Bartlake Str. 5 01099 Dresden Germany