1. School of Microelectronics, State Key Laboratory of Integrated Chips and Systems, Fudan University, Shanghai 200433, P. R. China
2. School of Integrated Circuits, Shandong University, Jinan 250100, China
3. Suzhou Research Institute of Shandong University, Suzhou 215123, China
4. State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China
5. National Integrated Circuit Innovation Center, Shanghai 201203, China
6. Jiashan Fudan Institute, Jiaxing 314110, China