Influence of double bonds and cyclic structure on the AP‐PECVD of low‐ k organosilicon insulating layers
Author:
Affiliation:
1. Materials Research and Technology Department Luxembourg Institute of Science and Technology Belvaux Luxembourg
2. University of Luxembourg Esch‐sur‐Alzette Luxembourg
Publisher
Wiley
Subject
Polymers and Plastics,Condensed Matter Physics
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/ppap.202000222
Reference51 articles.
1. Polymer-Based Gate Dielectrics for Organic Field-Effect Transistors
2. High-k Gate Dielectrics for Emerging Flexible and Stretchable Electronics
3. Flexible, Low-Power Thin-Film Transistors Made of Vapor-Phase Synthesized High-k, Ultrathin Polymer Gate Dielectrics
4. Low-Voltage Organic Field-Effect Transistors and Inverters Enabled by Ultrathin Cross-Linked Polymers as Gate Dielectrics
5. CVD Polymers for Devices and Device Fabrication
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Improved Insulating Properties of Polymer Dielectric by Constructing Interfacial Composite Coatings;Materials;2023-12-22
2. Vapor-Deposited Polymer Films and Structure: Methods and Applications;Organic Materials;2023-04-19
3. Numerical modeling of gas‐phase reactions of tetraethoxysilane/O2/Ar atmospheric dielectric barrier discharge for deposition;Plasma Processes and Polymers;2023-04-10
4. Uniform deposition of silicon oxide film on cylindrical substrate by radially arranged plasma jet array;Surface and Coatings Technology;2022-05
5. Sol–gel deposited xerogel, aerogel and porogen based porous low-k thin films: A comparative investigation;International Journal of Modern Physics B;2021-05-05
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3