CVD Polymers for Devices and Device Fabrication
Author:
Affiliation:
1. Department of Chemical Engineering Massachusetts Institute of Technology 77 Massachusetts Avenue Cambridge MA 02139 USA
2. Department of Mechanical Industrial & Manufacturing Engineering The University of Toledo Toledo Ohio 43606 USA
Funder
Office of Naval Research
National Science Foundation
International Society of Nephrology
Army Research Office
Publisher
Wiley
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Link
https://onlinelibrary.wiley.com/doi/pdf/10.1002/adma.201604606
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1. CVD Polymers
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5. Metal-Organic Covalent Network Chemical Vapor Deposition for Gas Separation
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