AlN, ZnO thin films and AlN/ZnO or ZnO/AlN multilayer structures deposited by PLD for surface acoustic wave applications-Reference-Cited by-同舟云学术

AlN, ZnO thin films and AlN/ZnO or ZnO/AlN multilayer structures deposited by PLD for surface acoustic wave applications

Published:2015-01-28 Issue:4 Volume:212 Page:817-825
ISSN:1862-6300
Container-title:physica status solidi (a)
language:en
Short-container-title:Phys. Status Solidi A

Author:

Dutheil P.¹,Orlianges J.-C.¹,Crunteanu A.²,Catherinot A.¹,Champeaux C.¹

Affiliation:

1. Laboratoire de Sciences des Procédés Céramiques et de Traitements de Surface; SPCTS UMR 7315 CNRS, Université de Limoges; 12 rue Atlantis 87068 Limoges France

2. XLIM UMR 7252 CNRS; Université de Limoges; 123 avenue Albert Thomas 87060 Limoges France

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://onlinelibrary.wiley.com/wol1/doi/10.1002/pssa.201431747/fullpdf

Reference41 articles.

1. Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review

2. Microscale acoustofluidics: Microfluidics driven via acoustics and ultrasonics

3. ZnO film thickness effect on surface acoustic wave modes and acoustic streaming

4. Reactive DC magnetron sputtering of aluminum nitride films for surface acoustic wave devices

5. Preparation of aluminum nitride thin films by reactive sputtering and their applications to GHz‐band surface acoustic wave devices

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