Study of GaP Nucleation Layers Grown on Si by Plasma‐Enhanced Atomic Layer Deposition

Author:

Gudovskikh Alexander S.12ORCID,Uvarov Alexander. V.1,Morozov Ivan A.1,Bukatin Anton S.1,Baranov Artem I.1,Kudryashov Dmitry A.1,Kalyuzhnyy Nikolay A.3,Mintairov Sergey A.3,Zubkov Vasily I.2ORCID,Yakovlev George E.2ORCID,Kleider Jean-Paul4

Affiliation:

1. Renewable Energy LaboratorySt. Petersburg National Research Academic University RAS St. Petersburg 194091 Russia

2. Saint-Petersburg Electrotechnical University “LETI” St. Petersburg 197376 Russia

3. Photovoltaics LaboratoryIoffe Institute St. Petersburg 194021 Russia

4. GeePs, Group of electrical engineering – Paris, CNRS, CentraleSupélecUniv. Paris-Sud, Université Paris-SaclaySorbonne Université Gif-sur-Yvette Cedex 91192 France

Funder

Russian Science Foundation

Publisher

Wiley

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. G.Dushaq A.Siddiqui K.Jumaa A.Nayfeh M.Rasras inIEEE 7th World Conf. Photovolt. Energy Conversion WCPEC 2018 ‐ A Jt. Conf. 45th IEEE PVSC 28th PVSEC 34th EU PVSEC IEEE New Jersey2018 p.3857.

2. E.García-Tabares I.Garcia I.Rey‐Stolle C.Algora D.Martín inProc. 8th Spanish Conf. Electron Devices CDE'2011 IEEE New Jersey2011.

3. GaAs on Si epitaxy by aspect ratio trapping: Analysis and reduction of defects propagating along the trench direction

4. III N V semiconductors for solar photovoltaic applications

5. Evolution of silicon bulk lifetime during III–V‐on‐Si multijunction solar cell epitaxial growth

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