Wet Chemical Treatment and Mg Doping of p‐InP Surfaces for Ohmic Low‐Resistive Metal Contacts

Abstract

Manufacturing a low‐resistive Ohmic metal contact on p‐type InP crystals for various applications is a challenge because of the Fermi‐level pinning via surface defects and the diffusion of p‐type doping atoms in InP. Development of wet‐chemistry treatments and nanoscale control of p‐doping for InP surfaces is crucial for decreasing the device resistivity losses and durability problems. Herein, a proper combination of HCl‐based solution immersion, which directly provides an unusual wet chemical‐induced InP(100)c(2 × 2) atomic structure, and low‐temperature Mg‐surface doping of the cleaned InP before Ni‐film deposition is demonstrated to decrease the contact resistivity of Ni/p‐InP by the factor of 10 approximately as compared to the lowest reference value without Mg. Deposition of the Mg intermediate layer on p‐InP and postheating of Mg/p‐InP at 350 °C, both performed in ultrahigh‐vacuum (UHV) chamber, lead to intermixing of Mg and InP elements according to X‐ray photoelectron spectroscopy. Introducing a small oxygen gas background (O2 ≈ 10−6 mbar) in UHV chamber during the postheating of Mg/p‐InP enhances the indium outdiffusion and provides the lowest contact resistivity. Quantum mechanical simulations indicate that the presence of InP native oxide or/and metal indium alloy at the interface increases In diffusion.