High‐Aspect‐Ratio Grating Microfabrication by Platinum‐Assisted Chemical Etching and Gold Electroplating-Reference-Cited by-同舟云学术

High‐Aspect‐Ratio Grating Microfabrication by Platinum‐Assisted Chemical Etching and Gold Electroplating

Author:

Romano Lucia¹²³^ORCID,Vila-Comamala Joan¹²,Jefimovs Konstantins¹²,Stampanoni Marco¹²

Affiliation:

1. Paul Scherrer Institut Forschungsstrasse 111 CH-5232 Villigen Switzerland

2. Institute for Biomedical Engineering University and ETH Zürich 8092 Zürich Switzerland

3. Department of Physics and CNR-IMM University of Catania 64 via S. Sofia 95123 Catania Italy

Funder

FP7 Ideas: European Research Council

Eurostars

Swiss Nanoscience Institute

Publisher

Wiley

Subject

Condensed Matter Physics,General Materials Science

Link

Reference60 articles.

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