Resolving Mechanical Properties and Morphology Evolution of Free‐Standing Ferroelectric Hf 0.5 Zr 0.5 O 2-Reference-Cited by-同舟云学术

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Resolving Mechanical Properties and Morphology Evolution of Free‐Standing Ferroelectric Hf 0.5 Zr 0.5 O 2

Published:2021-10-26 Issue:12 Volume:23 Page:2101221
ISSN:1438-1656
Container-title:Advanced Engineering Materials
language:en
Short-container-title:Adv Eng Mater

Author:

Tharpe Troy¹^ORCID,Zheng Xu-Qian¹^ORCID,Feng Philip X.-L.¹^ORCID,Tabrizian Roozbeh¹^ORCID

Affiliation:

1. Department of Electrical & Computer Engineering Herbert Wertheim College of Engineering University of Florida Gainesville FL 32611-6200 USA

Funder

Defense Advanced Research Projects Agency

Division of Electrical, Communications and Cyber Systems

National Science Foundation

Publisher

Wiley

Subject

Condensed Matter Physics,General Materials Science

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1002/adem.202101221

Reference53 articles.

1. Ferroelectricity in hafnium oxide thin films

2. Next generation ferroelectric materials for semiconductor process integration and their applications

3. Ferroelectric hafnium oxide for ferroelectric random-access memories and ferroelectric field-effect transistors

4. Review and perspective on ferroelectric HfO2-based thin films for memory applications

5. J.Okuno T.Kunihiro K.Konishi H.Maemura Y.Shuto S. F. M.Materano T.Ali K.Kuehnel K.Seidel U.Schroeder T.Mikolajick M.Tsukamoto T.Umebayashi Proc. of the 2020 IEEESymp. on VLSI Technology Honolulu Hawaii USA2020 https://doi.org/10.1109/VLSITechnology18217.2020.9265063.

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1. Effects of shear and bending strains on domain structures in freestanding ferroelectric thin films from phase-field simulations;Applied Physics Letters;2024-08-05

2. A Radiofrequency Threshold Temperature Sensor Using a Hf_0.5Zr_0.5O₂ Device and a Microacoustic Piezoelectric Resonant Sensor;Journal of Microelectromechanical Systems;2024-04

3. Photoinduced patterning of oxygen vacancies to promote the ferroelectric phase of Hf0.5Zr0.5O2;Applied Physics Letters;2024-02-05

4. An Instinctually Adaptive Lamb-Wave Filter Using Nonlinear Hafnia-Zirconia Ferroelectric Transducer;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

5. A ferroelectric-gate fin microwave acoustic spectral processor;Nature Electronics;2024-01-02

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