1. NaMLab gGmbH, Noethnitzer Str. 64, D-01187 Dresden, Germany
2. Institute of Semiconductors and Microsystems (IHM), TU Dresden, D-01062 Dresden, Germany
3. School of Materials Science and Engineering, Pusan National University, 2 Busandaehak-ro 63beon-gil, Geumjeong-gu, Busan 46241, Republic of Korea
4. Materials and Processes for Micro/Nanosystem Technologies, University of Kiel, Institute for Material Science, Kaiserstr. 2, 24143 Kiel, Germany